Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806109 | Method of fabricating nitride based semiconductor substrate and method of fabricating nitride based semiconductor device | Toshiya Yokogawa, Akihiko Ishibashi, Yoshiaki Hasegawa | 2004-10-19 |