Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806606 | Magnetic bearing device with vibration restraining function, magnetic bearing device with vibration estimating function, and pump device with the magnetic bearing devices mounted thereto | Yoshinobu Ohtachi, Hideo Fukami | 2004-10-19 |
| 6736593 | Protective device for a turbo molecular pump and method of protecting a turbo molecular pump | Akira Yamauchi | 2004-05-18 |