Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703771 | Monochromatic vacuum ultraviolet light source for photolithography applications based on a high-pressure microhollow cathode discharge | Kurt F. Becker, Peter F. Kurunczi | 2004-03-09 |