Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780764 | Method of forming a patterned tungsten damascene interconnect | Tomoyuki Morita | 2004-08-24 |
| 6767812 | Method of forming CVD titanium film | Kazuhide Abe | 2004-07-27 |
| 6759747 | Semiconductor device having damascene interconnection structure that prevents void formation between interconnections | — | 2004-07-06 |
| 6706645 | Method of manufacturing a semiconductor device | Tomoyuki Morita | 2004-03-16 |