Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830854 | System and method for correcting 3D effects in an alternating phase-shifting mask | Yong Liu | 2004-12-14 |
| 6813759 | Hybrid optical proximity correction for alternating aperture phase shifting designs | Weinong Lai, Xiaoyang Li | 2004-11-02 |
| 6704921 | Automated flow in PSM phase assignment | — | 2004-03-09 |
| 6684382 | Microloading effect correction | — | 2004-01-27 |