Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693043 | Method for removing photoresist from low-k films in a downstream plasma system | Senzi Li, Helmuth Treichel, Kirk Ostrowski, Chevan Goonetilleke, David Chen | 2004-02-17 |