Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6807972 | Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber | Ho-Man Rodney Chiu, Steven Verhaverbeke, Brian H. Burrows | 2004-10-26 |