Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6722835 | System and method for processing semiconductor wafers including single-wafer load lock | Antoni F. Jakubiec | 2004-04-20 |
| 6712907 | Magnetically coupled linear servo-drive mechanism | Thomas M. Pratt, Scott McClelland, Kerry Hopkins | 2004-03-30 |