HY

Hiroshi Yamahata

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
📍 Zama, JP: #17 of 60 inventorsTop 30%
Overall (2004): #207,435 of 270,089Top 80%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6755603 Apparatus for and method of transporting substrates to be processed — 2004-06-29