Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811606 | Manufacturing method for calcium fluoride and calcium fluoride for photolithography | Tsutomu Mizugaki, Kazuo Kimura, Shuuichi Takano | 2004-11-02 |
| 6782074 | Optical member for photolithography and method for evaluating the same | — | 2004-08-24 |