Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6741394 | Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus | Yuji Kudo, Mitsunori Toyoda, Masato Shibuya | 2004-05-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6741394 | Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus | Yuji Kudo, Mitsunori Toyoda, Masato Shibuya | 2004-05-25 |