Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800968 | Linear motor | Toru Shikayama, Yasuhiro Miyamoto | 2004-10-05 |
| 6731029 | Canned linear motor | Toru Shikayama, Shusaku Yoshida, Jianping Yu | 2004-05-04 |
| 6710847 | Exposure method and exposure apparatus | — | 2004-03-23 |