Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794657 | Magnetic shunt assembly for an exposure apparatus | — | 2004-09-21 |
| 6770987 | Brushless electric motors with reduced stray AC magnetic fields | Denis F. Spicer, Christopher T. Black | 2004-08-03 |
| 6734117 | Periodic clamping method and apparatus to reduce thermal stress in a wafer | — | 2004-05-11 |