Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713492 | N-acyloxylated cycloalkyl compounds, composition containing the same and methods of use therefor | Osamu Itoh, Heitaro Obara, Hidekatsu Yokoyama | 2004-03-30 |
| 6707528 | Exposure apparatus having independent chambers and methods of making the same | Hiroyasu Fujita | 2004-03-16 |
| 6697145 | Substrate processing apparatus for coating photoresist on a substrate and forming a predetermined pattern on a substrate by exposure | — | 2004-02-24 |