Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829039 | Optical member for photolithography and method of evaluating the same | Kazumasa Endo, Kazuhiro Nakagawa, Masaaki Mochida | 2004-12-07 |
| 6769273 | Method of manufacturing silica glass member and silica glass member obtained by the method | Kazuhiro Nakagawa | 2004-08-03 |
| 6732546 | Product method of synthetic silica glass and thermal treatment apparatus | Shouji Yajima, Yasuji Ishida | 2004-05-11 |
| 6672109 | Silica glass member, method for producing the same, and projection aligners using the same | — | 2004-01-06 |