Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833904 | Exposure apparatus and method of fabricating a micro-device using the exposure apparatus | — | 2004-12-21 |
| 6819403 | Illumination optical system, exposure apparatus, and microdevice manufacturing method | — | 2004-11-16 |
| 6781671 | Imaging optical system and exposure apparatus | — | 2004-08-24 |
| 6768537 | Projection optical system, exposure apparatus, and exposure method | Takeshi Suzuki, Yasuhiro Omura | 2004-07-27 |
| 6727980 | Apparatus and method for pattern exposure and method for adjusting the apparatus | Kazuya Ota, Akikazu Tanimoto, Tsuneyuki Hagiwara, Takashi Mori | 2004-04-27 |