Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821912 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, Piero Sferlazzo | 2004-11-23 |
| 6682288 | Substrate processing pallet and related substrate processing method and machine | Martin Klein, Piero Sferlazzo | 2004-01-27 |