Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723664 | Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction | Hideki Matsumura, Akira Izumi, Atsushi Masuda, Yosuke Miyoshi, Shuji Nomura +2 more | 2004-04-20 |