Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821687 | Photo mask for fabricating semiconductor device having dual damascene structure | Takashi Yokoyama, Kazutoshi Shiba, Noriaki Oda | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821687 | Photo mask for fabricating semiconductor device having dual damascene structure | Takashi Yokoyama, Kazutoshi Shiba, Noriaki Oda | 2004-11-23 |