Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835652 | Method of fabricating patterns with a dual damascene process | — | 2004-12-28 |
| 6812155 | Pattern formation method | — | 2004-11-02 |
| 6800402 | Phase-shifting mask and method of forming pattern using the same | — | 2004-10-05 |
| 6699626 | Mask set for use in phase shift photolithography technique which is suitable to form random patterns | — | 2004-03-02 |