Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6813031 | Method of determining material using intensity of light | Claudio L. Rampoldi | 2004-11-02 |
| 6772620 | Method of generating calibration data for relative height measurement | — | 2004-08-10 |
| 6762846 | Substrate surface profile and stress measurement | — | 2004-07-13 |
| 6710888 | Method of measuring dishing | — | 2004-03-23 |
| 6700670 | Method of measuring dishing using relative height measurements | — | 2004-03-02 |