Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825131 | Method for forming dielectric thin film and dielectric thin film formed thereby | Koichi Nishida, Koki Shibuya | 2004-11-30 |
| 6803074 | Method of producing complex oxide thin-film and production apparatus | — | 2004-10-12 |
| 6727187 | Fabrication method for semiconductor device | Michimasa Funabashi, Kenji Tanaka | 2004-04-27 |