Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805907 | Method and apparatus for vapor generation and film deposition | Benjamin Y. H. Liu | 2004-10-19 |
| 6746539 | Scanning deposition head for depositing particles on a wafer | Benjamin Y. H. Liu | 2004-06-08 |