Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6672171 | Combination differential and absolute pressure transducer for load lock control | Youfan Gu, Ole Wenzel | 2004-01-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6672171 | Combination differential and absolute pressure transducer for load lock control | Youfan Gu, Ole Wenzel | 2004-01-06 |