Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831997 | MASK DATA CORRECTION APPARATUS, FOURIER TRANSFORMATION APPARATUS, UP SAMPLING APPARATUS, DOWN SAMPLING APPARATUS, METHOD OF MANUFACTURING TRANSFER MASK, AND METHOD OF MANUFACTURING DEVICE HAVING PATTERN STRUCTURE | — | 2004-12-14 |
| 6737198 | Photomask, fabrication method of photomask, and fabrication method of semiconductor integrated circuit | — | 2004-05-18 |