Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6810888 | Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism | Masato Tsuchiya, Shunichi Ogasawara | 2004-11-02 |
| 6672318 | Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism | Masato Tsuchiya, Shunichi Ogasawara | 2004-01-06 |