Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795747 | Reducing asymmetrically deposited film induced registration error | Erik Byers | 2004-09-21 |
| 6778275 | Aberration mark and method for estimating overlay error and optical aberrations | — | 2004-08-17 |
| 6730444 | Needle comb reticle pattern for critical dimension and registration measurements using a registration tool and methods for using same | — | 2004-05-04 |