Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835121 | Chemical-mechanical polishing methods | — | 2004-12-28 |
| 6835668 | Copper post-etch cleaning process | Paul A. Morgan | 2004-12-28 |
| 6787473 | Post-planarization clean-up | — | 2004-09-07 |
| 6740252 | Ruthenium silicide wet etch | Brenda D. Kraus | 2004-05-25 |