Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6722943 | Planarizing machines and methods for dispensing planarizing solutions in the processing of microelectronic workpieces | — | 2004-04-20 |
| 6682628 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | James J. Hoffmann, Gundu M. Sabde, Stephen J. Kramer | 2004-01-27 |