Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6762125 | Modified facet etch to prevent blown gate oxide and increase etch chamber life | William A. Polinsky, Thomas S. Kari | 2004-07-13 |
| 6727158 | Structure and method for forming a faceted opening and a layer filling therein | Dirk Sundt, William A. Polinsky, Gabriel Videla, Chris L. Inman | 2004-04-27 |