Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720266 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore | 2004-04-13 |
| 6699791 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Gundu M. Sabde, Stephen J. Kramer, Scott E. Moore | 2004-03-02 |