Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803316 | Method of planarizing by removing all or part of an oxidizable material layer from a semiconductor substrate | Michael A. Walker | 2004-10-12 |
| 6794289 | Method and apparatuses for making and using bi-modal abrasive slurries for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies | — | 2004-09-21 |
| 6716089 | Method for controlling pH during planarization and cleaning of microelectronic substrates | Judson R. Sharples, Kenneth F. Zacharias | 2004-04-06 |
| 6713384 | Contact integration method | Richard L. Elliott | 2004-03-30 |