Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6817057 | Spindle chuck cleaner | Paul D. Shirley | 2004-11-16 |
| 6812999 | Device and method of correcting exposure defects in photolithography | — | 2004-11-02 |
| 6784975 | Method and apparatus for irradiating a microlithographic substrate | Ulrich Boettiger, Scott L. Light, William T. Rericha | 2004-08-31 |
| 6727975 | Device and method of correcting exposure defects in photolithography | — | 2004-04-27 |
| 6708131 | Wafer alignment system | James W. Laursen | 2004-03-16 |