Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787055 | Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Daniel G. Custer | 2004-09-07 |
| 6719823 | Polishing systems, methods of polishing substrates, and methods of cleaning polishing slurry from substrate surfaces | Dan Custer, Shawn M. Lewis | 2004-04-13 |
| 6716802 | Polishing systems, methods of polishing substrates, and methods of preparing liquids for semiconductor fabrication processes | Dan Custer, Shawn M. Lewis | 2004-04-06 |