Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806193 | CMP in-situ conditioning with pad and retaining ring clean | Vincent C. Korthuis, Mona Eissa, Syed Hamid | 2004-10-19 |
| 6684125 | In-situ randomization and recording of wafer processing order at process tools | Randolph W. Kahn, Kenneth G. Vickers, Richard L. Guldi, Edward J. Leonard | 2004-01-27 |
| 6677766 | Shallow trench isolation step height detection method | Freidoon Mehrad, Kayvan Sadra | 2004-01-13 |