Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821342 | Method for forming suspended microstructures | Michael F. Mattes | 2004-11-23 |
| 6793830 | Method for forming a microstructure from a monocrystalline substrate | Michael F. Mattes | 2004-09-21 |