Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812136 | Method of making a semiconductor device having a multilayer metal film of titanium/titanium nitride/tungsten/tungsten carbide | Mitsutoshi Koyama, Takeshi Kubota | 2004-11-02 |