Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812145 | Method of reducing plasma charging damage during dielectric etch process for dual damascene interconnect structures | — | 2004-11-02 |
| 6806101 | Ferroelectric capacitor plasma charging monitor | Guoqiang Xing, Stephen Roy Gilbert | 2004-10-19 |
| 6673636 | Method of real-time plasma charging voltage measurement on powered electrode with electrostatic chuck in plasma process chambers | — | 2004-01-06 |