Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713408 | Method of producing silica micro-structures from x-ray lithography of SOG materials | Michael Vasile, Philip J. Coane | 2004-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713408 | Method of producing silica micro-structures from x-ray lithography of SOG materials | Michael Vasile, Philip J. Coane | 2004-03-30 |