Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6813098 | Variable numerical aperture large-field unit-magnification projection system | — | 2004-11-02 |
| RE38403 | Projection optical system and projection exposure apparatus | Toshihiro Sasaya, Kazuo Ushida, Yutaka Suenaga | 2004-01-27 |