Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808978 | Method for fabricating metal electrode with atomic layer deposition (ALD) in semiconductor device | — | 2004-10-26 |
| 6800542 | Method for fabricating ruthenium thin layer | — | 2004-10-05 |
| 6770561 | Method for depositing metal film through chemical vapor deposition process | — | 2004-08-03 |