Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804327 | Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays | Guido Schriever | 2004-10-12 |
| 6735233 | Gas discharge laser with means for removing gas impurities | Rustem Osmanow | 2004-05-11 |
| 6727731 | Energy control for an excimer or molecular fluorine laser | Guenter Nowinski | 2004-04-27 |