Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6739958 | Carrier head with a vibration reduction feature for a chemical mechanical polishing system | Andrew J. Nagengast | 2004-05-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6739958 | Carrier head with a vibration reduction feature for a chemical mechanical polishing system | Andrew J. Nagengast | 2004-05-25 |