Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800173 | Variable gas conductance control for a process chamber | Tony P. Chiang, Jeffrey A. Brown, Jason Babcoke | 2004-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800173 | Variable gas conductance control for a process chamber | Tony P. Chiang, Jeffrey A. Brown, Jason Babcoke | 2004-10-05 |