Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827866 | Deep-well lithography process for forming micro-electro-mechanical structures | — | 2004-12-07 |
| 6751395 | Micro-electro-mechanical variable optical attenuator | Yee-Chung Fu, Zuo Wang | 2004-06-15 |