Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836033 | Apparatus for precisely driving X-Y stages using VCM | Ki Hyun Kim | 2004-12-28 |
| 6744510 | Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment | Sung Lim Park, Jae Wha Jeong | 2004-06-01 |