Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689515 | Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank | Nobuyuki Yoshioka, Akihiko Isao, Susumu Kawada, Tsuneo Yamamoto, Ryoichi Kobayashi | 2004-02-10 |