Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6678143 | Electrostatic chuck and method of manufacturing the same | Kiyotoshi Fujii | 2004-01-13 |
SM
Shinsuke Masuda
Overall (2004): #116,167 of 270,089Top 45%
1
Patents 2004