Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815661 | Specimen scanning mechanism adapted for implementation in a FIMS system | Paul S. Filipski | 2004-11-09 |
| 6784418 | Semiconductor processing tool alignment technique implemented in a FIMS system | Paul S. Filipski | 2004-08-31 |
| 6765222 | Detection of motive force applied to transport box mounted on a fims system | Paul S. Filipski | 2004-07-20 |