Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784508 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Seiji Inumiya, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2004-08-31 |
| 6759314 | Method for manufacturing semiconductor devices using thermal nitride films as gate insulating films | Wakako Moriyama, Naoki Kai, Hiroaki Hazama, Keiki Nagai, Yuji Fukazawa +2 more | 2004-07-06 |